DOE OSTI · 1925076
Doped gate dielectrics materials
Abstract
A field effect transistor having at least a gate, source, and drain electrodes and a semiconductor channel for controlling transport of charge carriers between the source and drain electrodes, the gate being insulated from the channel by an dielectric, at least a portion of the dielectric disposed between the gate electrode and the semiconductor channel being doped or imbued with the an element which if doped or imbued into a semiconductor material would cause the semiconductor to be p-type. The p-type element used to dope or imbue the gate dielectric is preferably Mg.
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Cao, Yu, Chu, Rongming, Li, Zijian Ray. 2022-09-06. Doped gate dielectrics materials. https://www.osti.gov/biblio/1925076
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