DOE OSTI · 1924994
Liquid masks for microfabrication processes
Abstract
Disclosed herein are methods of using a fluoro oil mask to prepare a beam pen lithography pen array.
Keep this discovery
Explore connections, maps & timelines
Mirkin, Chad A., Walker, David A., Hedrick, III, James L.. 2022-08-16. Liquid masks for microfabrication processes. https://www.osti.gov/biblio/1924994
Cite the original work for its findings. Save a collection to share your selection of sources.