Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Stanfill, Bryan A.; Reehl, Sarah M.; Johnson, Margaret C.; Bramer, Lisa M.; Browning, Nigel D.; Stevens, Andrew J.; Kovarik, Libor

DOE OSTI · 1632476

Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Stanfill, Bryan A.·Reehl, Sarah M.·Johnson, Margaret C.·Bramer, Lisa M.·Browning, Nigel D.·Stevens, Andrew J.·Kovarik, Libor

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Abstract

Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.

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Stanfill, Bryan A., Reehl, Sarah M., Johnson, Margaret C., Bramer, Lisa M., Browning, Nigel D., Stevens, Andrew J., Kovarik, Libor. 2020-01-21. Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets. https://www.osti.gov/biblio/1632476

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