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DOE OSTI · 1117858

Solution deposition assembly

Roussillon, Yann·Scholz, Jeremy H·Shelton, Addison·Green, Geoff T·Utthachoo, Piyaphant
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Abstract

Methods and devices are provided for improved deposition systems. In one embodiment of the present invention, a deposition system is provided for use with a solution and a substrate. The system comprises of a solution deposition apparatus; at least one heating chamber, at least one assembly for holding a solution over the substrate; and a substrate curling apparatus for curling at least one edge of the substrate to define a zone capable of containing a volume of the solution over the substrate. In another embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.

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Roussillon, Yann, Scholz, Jeremy H, Shelton, Addison, Green, Geoff T, Utthachoo, Piyaphant. 2014-01-21. Solution deposition assembly. https://www.osti.gov/biblio/1117858

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