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DOE OSTI · 1026669

Surface characterization based on optical phase shifting interferometry

Ares, J
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Abstract

Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.

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BibTeXRIS

Ares, J. 2011-08-02. Surface characterization based on optical phase shifting interferometry. https://www.osti.gov/biblio/1026669

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