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DOE OSTI · 1019407

Cluster generator

Donchev, Todor I·Petrov, Ivan G
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Abstract

Described herein is an apparatus and a method for producing atom clusters based on a gas discharge within a hollow cathode. The hollow cathode includes one or more walls. The one or more walls define a sputtering chamber within the hollow cathode and include a material to be sputtered. A hollow anode is positioned at an end of the sputtering chamber, and atom clusters are formed when a gas discharge is generated between the hollow anode and the hollow cathode.

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BibTeXRIS

Donchev, Todor I, Petrov, Ivan G. 2011-05-31. Cluster generator. https://www.osti.gov/biblio/1019407

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