NASA Ultra-Sensitive Miniature Accelerometer

Abstract

Using micro-machined silicon technology, an ultra-sensitive miniature accelerometer can be constructed which meets the requirements for microgravity experiments in the space environment. Such an accelerometer will have a full scale sensitivity of 10 -2 g, a resolution of 10 -8 g, low cross-axis sensitivity, and low temperature sensitivity. Mass of the device is approximately five grams and its footprint is 2 cm x 2 cm.