Pulsed-Source Interferometry in Acoustic Imaging

Abstract

A combination of pulsed-source interferometry and acoustic diffraction has been proposed for use in imaging subsurface microscopic defects and other features in such diverse objects as integrated-circuit chips, specimens of materials, and mechanical parts. A specimen to be inspected by this technique would be mounted with its bottom side in contact with an acoustic transducer driven by a continuous-wave acoustic signal at a suitable frequency, which could be as low as a megahertz or as high as a few hundred gigahertz. The top side of the specimen would be coupled to an object that would have a flat (when not vibrating) top surface and that would serve as the acoustical analog of an optical medium (in effect, an acoustical "optic").