NASA NTRS · 20080005016
Micromachined double resonator
Abstract
A micromachined resonator mountable to an external support structure has a proof mass coupled to a base structure by a first spring structure, the base structure having a plurality of electrodes, and a second spring structure coupling the base structure to the external support structure.
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Gutierrez, Roman, Tang, Tony K., Shcheglov, Kirill. 2002-04-09. Micromachined double resonator. https://ntrs.nasa.gov/citations/20080005016
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