NASA NTRS · 20080004454
Micromachined peristaltic pumps
Abstract
Micromachined pumps including a channel formed between a first membrane and a substrate or between first and second flexible membranes. A series of electrically conductive strips is applied to a surface of the substrate or one of the membranes. Application of a sequential voltage to the series of strips causes a region of closure to progress down the channel to achieve a pumping action.
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Hartley, Frank T.. 1999-12-28. Micromachined peristaltic pumps. https://ntrs.nasa.gov/citations/20080004454
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