Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response

Keymeulen, Didier; Ferguson, Michael I.; Fink, Wolfgang; Oks, Boris; Peay, Chris; Terrile, Richard; Cheng, Yen; Kim, Dennis; MacDonald, Eric; Foor, David

NASA NTRS · 20060044400

Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response

Keymeulen, Didier·Ferguson, Michael I.·Fink, Wolfgang·Oks, Boris·Peay, Chris·Terrile, Richard·Cheng, Yen·Kim, Dennis·MacDonald, Eric·Foor, David

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Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. We also report on the development of a hardware platform for integrated tuning and closed loop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

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BibTeX RIS

Keymeulen, Didier, Ferguson, Michael I., Fink, Wolfgang, Oks, Boris, Peay, Chris, Terrile, Richard, Cheng, Yen, Kim, Dennis, MacDonald, Eric, Foor, David. 2005-09-12. Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response. https://ntrs.nasa.gov/citations/20060044400

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