Field-effect Flow Control in Polymer Microchannel Networks

Abstract

A new Bio-MEMS electroosmotic flow (EOF) modulator for plastic microchannel networks has been developed. The EOF modulator uses field-effect flow control (FEFC) to adjust the zeta potential at the Parylene C microchannel wall. By setting a differential EOF pumping rate in two of the three microchannels at a T-intersection with EOF modulators, the induced pressure at the intersection generated pumping in the third, field-free microchannel. The EOF modulators are able to change the magnitude and direction of the pressure pumping by inducing either a negative or positive pressure at the intersection. The flow velocity is tracked by neutralized fluorescent microbeads in the microchannels. The proof-of-concept of the EOF modulator described here may be applied to complex plastic ,microchannel networks where individual microchannel flow rates are addressable by localized induced-pressure pumping.