Pressure Relief Valve

Abstract

"Sputtering" is the process of applying film-like metal coatings onto a surface by bombarding the coating material with electrocharged ions. This causes the material to disintegrate and relocate on the substrate an atom layer at a time. The process allows a variety of coating materials to be deposited on various surfaces. Deposition Technology, Inc. (DTI) uses "sputtering" for window films, packaging materials, etc. Valves installed on two vacuum chambers which are part of DTI's system, were developed by Lewis Research Center and detailed in Tech Briefs. The valve protects the environment and frees the operator from monitoring the chamber venting.