NASA NTRS · 20020066440
Cleaning up Silicon
Abstract
A development program that started in 1975 between Union Carbide and JPL, led to Advanced Silicon Materials LLC's, formerly ASiMI, commercial process for producing silane in viable quantities. The process was expanded to include the production of high-purity polysilicon for electronic devices. The technology came out of JPL's Low Cost Silicon Array Project.
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2000-01-01. Cleaning up Silicon. https://ntrs.nasa.gov/citations/20020066440
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