NASA NTRS · 20020064721
High Temperature Semiconductor Process
Abstract
A sputtering deposition system capable of depositing large areas of high temperature superconducting materials was developed by CVC Products, Inc. with the support of the Jet Propulsion Laboratory SBIR (Small Business Innovative Research) program. The system was devleoped for NASA to produce high quality films of high temperature superconducting material for microwave communication system components. The system is also being used to deposit ferroelectric material for capacitors and the development of new electro-optical materials.2002103899
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1998-01-01. High Temperature Semiconductor Process. https://ntrs.nasa.gov/citations/20020064721
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