Three-Dimensional Displacement Measurement Using Diffractive Optic Interferometry

Abstract

This paper introduces a powerful new optical method which utilizes diffractive optic interferometry (DOI) to measure both in-plane and out-of-plane displacement with variable sensitivity using the same optical system. Sensitivity is varied by utilizing various combinations of the different wavefronts produced by a conjugate pair of binary Optical elements; a transmission grating is used to produce several illumination beams while a reflective grating replicated on the surface of a specimen, provides the reference for the undeformed state. A derivation of the equations which govern the method is included along with a discussion Of the experimental tests conducted to verify the theory. Overall, the results are excellent, with experimental data agreeing to within a few percent of the theoretical predictions.