NASA NTRS · 19990106558
Cryogenic High Pressure Sensor Module
Abstract
A pressure sensor is provided for cryogenic, high pressure applications. A highly doped silicon piezoresistive pressure sensor is bonded to a silicon substrate in an absolute pressure sensing configuration. The absolute pressure sensor is bonded to an aluminum nitride substrate. Aluminum nitride has appropriate coefficient of thermal expansion for use with highly doped silicon at cryogenic temperatures. A group of sensors, either two sensors on two substrates or four sensors on a single substrate are packaged in a pressure vessel.
Keep this discovery
Explore connections, maps & timelines
Chapman, John J., Shams, Qamar A., Powers, William T.. 1999-09-21. Cryogenic High Pressure Sensor Module. https://ntrs.nasa.gov/citations/19990106558
Cite the original work for its findings. Save a collection to share your selection of sources.