Micromachined Ion Accelerators

Abstract

Proposed ion accelerators made by micromachining techniques. Advantages include small size and weight, modularity, and compatibility with integrated circuits. Used as sources of ion beams for industrial processes. Ion accelerator of this type combined with integrated electronic control and power circuitry, plus similarly miniaturized valves and other mechanisms for regulating flow of gas used to generate ions - all micromachined on single chip. Provides flexibility for tailoring characteristics of ion sources for specific applications; for example, construct array of many such devices to obtain large ion source or position multiple devices to obtain desired ion-beam pattern in processing chamber.