NASA NTRS · 19940004344
Reliability in CMOS IC processing
Abstract
Critical CMOS IC processing reliability monitors are defined in this paper. These monitors are divided into three categories: process qualifications, ongoing production workcell monitors, and ongoing reliability monitors. The key measures in each of these categories are identified and prioritized based on their importance.
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Shreeve, R., Ferrier, S., Hall, D., Wang, J.. 1990-11-06. Reliability in CMOS IC processing. https://ntrs.nasa.gov/citations/19940004344
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