NASA NTRS · 19940000617
Improved Electromechanical Infrared Sensor
Abstract
Proposed electromechanical infrared detector improved version of device described in "Micromachined Electron-Tunneling Infrared Detectors" (NPO-18413). Fabrication easier, and undesired sensitivity to acceleration reduced. In devices, diaphragms and other components made of micromachined silicon, and displacements of diaphragms measured by electron tunneling displacement transducer {see "Micromachined Tunneling Accelerometer" (NPO-18513)}. Improved version offers enhanced frequency response and less spurious response to acceleration.
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Kenny, Thomas W., Kaiser, William J.. 1994-11-01. Improved Electromechanical Infrared Sensor. https://ntrs.nasa.gov/citations/19940000617
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