NASA NTRS · 19940000603
Etching Polymer Optical Waveguides With Atomic Beams
Abstract
Directed beams of electrically neutral atoms used to etch smooth walls on polymer optical waveguides making waveguides more efficient.
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Minton, Timothy K., Perry, Joseph W.. 1994-10-01. Etching Polymer Optical Waveguides With Atomic Beams. https://ntrs.nasa.gov/citations/19940000603
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