NASA NTRS · 19930000708
Micromachined Tunneling Accelerometer
Abstract
Separation of tunneling electrodes adjusted by varying electrostatic force. Major components of tunneling transducer formed on two silicon chips by microfabrication techniques. Use of electrostatic deflection reduces sensitivity of transducer to thermal drift and simplifies design. Sensitivity suitable for applications in which larger acceleration-sensing instruments required.
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Kenny, Thomas W., Waltman, Stephen B., Kaiser, William J., Reynolds, Joseph K.. 1993-11-01. Micromachined Tunneling Accelerometer. https://ntrs.nasa.gov/citations/19930000708
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