NASA NTRS · 19930000428
Amorphous-Carbon Films
Abstract
Report describes structure, preparation, characterization, and applications of films of amorphous-carbon. Amorphous-carbon films potentially useful as masks in x-ray lithography, layers for passivation of high-speed microelectronic circuits, hard films to protect magnetic recording media and optical components from degradation by chemical etching or wear, and radiation detectors.
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Pouch, John J., Alterovitz, Samuel A.. 1993-07-01. Amorphous-Carbon Films. https://ntrs.nasa.gov/citations/19930000428
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