Optical-precision alignment of diffraction grating mold in moire interferometry

Abstract

A high-precision optical method is presented for aligning diffraction grating molds with the edges of specimens in moire interferometry. The alignment fixture is simple and convenient to operate. The conventional method of grating-mold alignment has a wide band of uncertainty in the range of error which is not compatible with the required precision of high-sensitivity moire interferometry. Following a description of the alignment technique, both the single-edge and parallel-edge guide bar optical alignment methods are introduced and compared.