Advanced water window x-ray microscope design and analysis

Abstract

The project was focused on the design and analysis of an advanced water window soft-x-ray microscope. The activities were accomplished by completing three tasks contained in the statement of work of this contract. The new results confirm that in order to achieve resolutions greater than three times the wavelength of the incident radiation, it will be necessary to use aspherical mirror surfaces and to use graded multilayer coatings on the secondary (to accommodate the large variations of the angle of incidence over the secondary when operating the microscope at numerical apertures of 0.35 or greater). The results are included in a manuscript which is enclosed in the Appendix.