Projected-Fringe, Phase-Stepping Profilometer

Abstract

Projected-fringe, phase-stepping profilometer is system of optical, electronic, optoelectronic, and electro-optical equipment measuring surface profiles of objects. Projects optical interference pattern onto object and steps phase of pattern to extract phases of interfering beams where they intersect object. Data obtained within seconds. Noncontact, full-field surface profilometer has applications, including inspection of machined and ceramic parts, printed circuit boards, and optical components. Rugged and compact, measures surfaces with variety of sizes and finishes.