NASA NTRS · 19910000239
Cross-Quint-Bridge Resistor
Abstract
Integrated-circuit conductive test pattern intended to provide data on effects of design widths and design spacings upon actual widths of conductive lines. Provides for electrical measurements both on lines of unknown width and on features having known dimensions. Data from measurements on five bridges used to determine four parameters of mathematical model describing system. In principle, pattern determines effects of width and spacing and interaction between them.
Keep this discovery
Explore connections, maps & timelines
Hannaman, David J., Lieneweg, Udo, Buehler, Martin G., Mantalas, Linda. 1991-06-01. Cross-Quint-Bridge Resistor. https://ntrs.nasa.gov/citations/19910000239
Cite the original work for its findings. Save a collection to share your selection of sources.