Auger and ESCA analysis

Abstract

X-ray photoelectron spectroscopy (XPS or ESCA) and Auger electron spectroscopy (AES) techniques are discussed. The XPS instrument is a Perkin-Elmer 5400 system which provides both elemental and chemical state information without restriction on the type of material that can be analyzed. The AES instrument is a Kratos Analytical XSAM 800 system. AES uses a beam of high energy electrons as a surface probe. Following electronic rearrangements within excited atoms by this probe, Auger electrons characteristic of each element present are emitted from the sample. Specific examples of analytic techniques and results are presented.