NASA NTRS · 19880000156
MOSFET Electric-Charge Sensor
Abstract
Charged-particle probe compact and consumes little power. Proposed modification enables metal oxide/semiconductor field-effect transistor (MOSFET) to act as detector of static electric charges or energetic charged particles. Thickened gate insulation acts as control structure. During measurements metal gate allowed to "float" to potential of charge accumulated in insulation. Stack of modified MOSFET'S constitutes detector of energetic charged particles. Each gate "floats" to potential induced by charged-particle beam penetrating its layer.
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Robinson, Paul A., Jr.. 1988-03-01. MOSFET Electric-Charge Sensor. https://ntrs.nasa.gov/citations/19880000156
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