Low reflectance EUV materials - A comparative study

Abstract

A study has been undertaken of the performance characteristics of a variety of surfaces and surface treatments for use on baffle materials in Extreme UV Explorer instrumentation, in order to ascertain which materials performed with the least overall scattering between 300 and 1200 A and thereby minimize this important background source. Seven scattering samples were measured: bead-blasted aluminum treated with alodine 600, bead-blasted aluminum, Kel-f, etched molybdenum, nickel-plated etched molybdenum, bead-blasted 304 stainless steel, and bead-blasted aluminum painted with Chemglaze Z-306. Attention is given to total reflectance of each material plotted against the graze angle for 304, 584, and 1216 A.