NASA NTRS · 19870000306
Measuring Conductor Widths and Spacings Electrically
Abstract
Widths and spacings of conductor lines on integrated circuits measured electrically by split cross-bridge resistor technique. Speeds evaluation of integrated-circuit fabrication processes. When measurement of probe currents and voltages and reduction of measurement data automated, test structure probed and characterized in less than one second.
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Buehler, Martin G.. 1987-07-01. Measuring Conductor Widths and Spacings Electrically. https://ntrs.nasa.gov/citations/19870000306
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