Surface roughness studies with DALLAS-detector array for laser light angular scattering

Abstract

An attempt is made to develop a better mathematical description of optical scattering phenomena, in order to construct an optical scattering apparatus for reliable and routine measurements of roughness parameters without resorting to comparator standards. After a brief outline of optical scattering theory, a description is presented of an experimental instrument for measuring surface roughness which incorporates optical scattering principles. The instrument has a He-Ne laser which illuminates the test surface at a variable angle of incidence. Scattered light distribution is detected by an array of 87 fiber-optic sensors positioned in a rotating semicircular yoke. The output from the detector is digitized and analyzed in a laboratory computer. For a comparison with experimental data, theoretical distributions are calculated by substituting the roughness profiles into the operand of and integral equation for electromagnetic scattering developed by Beckmann and Spizzichino (1963). A schematic diagram of the instrument is provided and the general implications of the experimental results are discussed.