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NASA NTRS ยท 19840025960

Development of metallization process

Abstract

Pastes are evaluated that contain additives to aid in the silicon to metallization contact. None are completely successful. Pastes are evaluated using a heated stage scanning electron microscope (SEM). This equipment shows promise for future evaluations.

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BibTeXRIS

Garcia, A., III. 1984-07-01. Development of metallization process. https://ntrs.nasa.gov/citations/19840025960

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