NASA NTRS · 19830014243
Chemical etching for automatic processing of integrated circuits
Abstract
Chemical etching for automatic processing of integrated circuits is discussed. The wafer carrier and loading from a receiving air track into automatic furnaces and unloading onto a sending air track are included.
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Kennedy, B. W.. 1981-04-01. Chemical etching for automatic processing of integrated circuits. https://ntrs.nasa.gov/citations/19830014243
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