NASA NTRS · 19830009119
Fabrication techniques for superconducting readout loops
Abstract
Procedures for the fabrication of superconducting readout loops out of niobium on glass substrates were developed. A computer program for an existing fabrication system was developed. Both positive and negative resist procedures for the production of the readout loops were investigated. Methods used to produce satisfactory loops are described and the various parameters affecting the performance of the loops are analyzed.
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Payne, J. E.. 1982-08-01. Fabrication techniques for superconducting readout loops. https://ntrs.nasa.gov/citations/19830009119
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