NASA NTRS · 19830000508
Optical Testing of Integrated Circuits
Abstract
Optical spot-raster scanner produces weighted photoresponse image (PI) of operating CMOS IC. Digital analysis of PI's, which correlates differences in PI's with electrical behavior of IC, shows promise both as 100-percent screening method for use in IC manufacture and as diagnostic tool in IC development.
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Erickson, J.. 1984-11-01. Optical Testing of Integrated Circuits. https://ntrs.nasa.gov/citations/19830000508
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