Standing waves along a microwave generated surface wave plasma

Abstract

Two surface wave plasma columns, generated by microwave power in argon at gas pressures of 0.05 torr to 330 torr, interact in the same discharge tube to form standing surface waves. Radial electric field and azimuthal magnetic field outside the discharge tube are measured to be 90 deg out of phase with respect to axial position and to decay exponentially with radial distance from the tube axis. Maximum light emission occurs at the position of maximum azimuthal magnetic field and minimum radial electric field. Electron temperature and density are measured at low pressures with double probes inserted into the plasma at a null of radial electric field. Measured electron densities compare well with those predicted by Gould-Trivelpiece surface wave theory.