Refractory coatings

Abstract

A thin sputtered film is discussed which exhibits improved adherence to a substrate and has improved friction and wear characteristics. Each substrate is placed directly below a titanium carbide target of a commercial radiofrequency diode apparatus in a vacuum chamber. Nitrogen is bled into the system through a nozzle resulting in a small partial pressure of about 0.5% to 2.5% during the first two minutes of deposition. The flow of nitrogen is then stopped, and the sputtering ambient is reduced to pure argon through a nozzle without interrupting the sputtering process.