Gauge calibration system based on piston manometer

Abstract

An unbaked calibration system is described that permits absolute calibration with a piston manometer in the range 0.0002 to 6 Pa, with a probable error of 5 microPa + 0.8%, or in the range 0.00008 to 0.02 Pa, with a probable error of 2 microPa + 1%. Procedures and techniques that permit this performance are detailed. For hot-cathode ion gauges, the magnitudes of systematic corrections for envelope temperature and grid current are also indicated.