NASA NTRS · 19810016957
Low cost solar array project: Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process
Abstract
The results of the free space reactor experimental work are summarized. Overall, the objectives were achieved and the unit can be confidently scaled to the EPSDU size based on the experimental work and supporting theoretical analyses. The piping and instrumentation of the fluidized bed reactor was completed.
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1981-03-01. Low cost solar array project: Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. https://ntrs.nasa.gov/citations/19810016957
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