NASA NTRS · 19810015992
Low cost solar array project: Experimental process system development unit for producing semiconductor-grade silicon using silane-to-silicon process
Abstract
The design, fabrication, and installation of an experimental process system development unit (EPSDU) were analyzed. Supporting research and development were performed to provide an information data base usable for the EPSDU and for technological design and economical analysis for potential scale-up of the process. Iterative economic analyses were conducted for the estimated product cost for the production of semiconductor grade silicon in a facility capable of producing 1000-MT/Yr.
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1980-12-01. Low cost solar array project: Experimental process system development unit for producing semiconductor-grade silicon using silane-to-silicon process. https://ntrs.nasa.gov/citations/19810015992
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