NASA NTRS · 19810004472
Thin-film coatings
Abstract
Thin, adherent, high density films are discussed with respect to their application in two plasma physics techniques (ion plating and sputtering). The operation of each technique is described as well as what surfaces can be coated, and what kind of materials can be applied. The effects of these films on the mechanical properties of solid surfaces are also discussed.
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Buckley, D. H.. 1980-11-01. Thin-film coatings. https://ntrs.nasa.gov/citations/19810004472
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