NASA NTRS · 19790000073
Silicon tetrachloride spray feeder
Abstract
Silicon tetrachloride spray feeder mechanism is incorporated into high-temperature reactor for production of highly pure silicon intended for solar cells. Feeder supplies silicon tetrachloride as liquid droplets that rapidly vaporize in high temperature (2,000 to 2,200 K) reactor zone.
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Meyer, T. N., Wolf, C. B.. 1979-08-01. Silicon tetrachloride spray feeder. https://ntrs.nasa.gov/citations/19790000073
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