NASA NTRS · 19730020118
Atom beam surface interaction studies: Experimental system development
Abstract
Quantitative deposition by standard techniques of adsorbates containing C and Si onto selected substrates is studied. The interaction kinetics of a beam of oxygen, nitrogen, or hydrogen atoms of known flux are investigated by Auger electron spectroscopy and LEED. Desborbed molecules will be analyzed by mass spectroscopy using modulated beam techniques. Experimental conditions permitting, two sets of measurements will be correlated.
Keep this discovery
Explore connections, maps & timelines
Gregory, J. C.. 1973-06-01. Atom beam surface interaction studies: Experimental system development. https://ntrs.nasa.gov/citations/19730020118
Cite the original work for its findings. Save a collection to share your selection of sources.