NASA NTRS · 19710060105
Metallization systems for semiconductor devices
Abstract
Metals and systems for semiconductor devices metallization, evaluating conductivity, adhesion, contact resistance, deposition ease, electrochemical corrosion, reliability and stability
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Terry, L. E., Wilson, R. W.. 1971-01-01. Metallization systems for semiconductor devices. https://ntrs.nasa.gov/citations/19710060105
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