NASA NTRS · 19710035381
Low stress integral coverslips
Abstract
Low stress integral coverslips deposition by high vacuum ion beam sputtering for solar cell manufacturing cost reduction
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Bartels, F. T. C., Kirkpatrick, A. R., Tripoli, G. A.. 1970-01-01. Low stress integral coverslips. https://ntrs.nasa.gov/citations/19710035381
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