NASA NTRS · 19690000413
Concept for improved vacuum pressure measuring device
Abstract
To measure vacuum pressures in the range of 5 times 10 to the minus 7 to 5 times 10 to the minus 16, a semiconductor resistor composed of sintered zinc oxide is used. Through the effect of surface absorbed gases on the resistance of the semiconductor material, very low pressures are measured.
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Medved, D. B.. 1969-09-01. Concept for improved vacuum pressure measuring device. https://ntrs.nasa.gov/citations/19690000413
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