NASA NTRS · 19660000141
Diffusion technique stabilizes resistor values
Abstract
Reduction of the contact resistance stabilizes the values, over a broad temperature range, of resistors used in linear integrated circuits. This reduction is accomplished by p-plus diffusion under the alloyed aluminum contacts.
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Gallagher, R. C., Giuliano, M. N.. 1966-04-01. Diffusion technique stabilizes resistor values. https://ntrs.nasa.gov/citations/19660000141
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