NASA NTRS · 19650040719
Effect of elevated temperatures on sputtering yields.
Abstract
Elevated temperatures effect on sputtering yields of polycrystalline and single crystal metals, considering defect annealing and focused collision sequence
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Carlston, C. E., Comeaux, A., Magnuson, G. D., Mahadevan, P.. 1965-05-03. Effect of elevated temperatures on sputtering yields.. https://ntrs.nasa.gov/citations/19650040719
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