NASA NTRS · 19630025757
SPUTTERING ION SOURCE FOR SOLIDS
Abstract
Sputtering argon ion source used for analysis of solids provides more stable operation than a spark source and allows electrometric recording of the mass spectrum
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Herzog, F. K., Liebl, H. J.. 1963-09-01. SPUTTERING ION SOURCE FOR SOLIDS. https://ntrs.nasa.gov/citations/19630025757
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